JPS625703U - - Google Patents
Info
- Publication number
- JPS625703U JPS625703U JP9665285U JP9665285U JPS625703U JP S625703 U JPS625703 U JP S625703U JP 9665285 U JP9665285 U JP 9665285U JP 9665285 U JP9665285 U JP 9665285U JP S625703 U JPS625703 U JP S625703U
- Authority
- JP
- Japan
- Prior art keywords
- inner conductor
- high frequency
- coaxial tube
- conductor
- frequency transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000112 cooling gas Substances 0.000 description 2
Landscapes
- Particle Accelerators (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Non-Reversible Transmitting Devices (AREA)
- Waveguides (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665285U JPS625703U (en]) | 1985-06-27 | 1985-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665285U JPS625703U (en]) | 1985-06-27 | 1985-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS625703U true JPS625703U (en]) | 1987-01-14 |
Family
ID=30962616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9665285U Pending JPS625703U (en]) | 1985-06-27 | 1985-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS625703U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022003628A (ja) * | 2020-06-23 | 2022-01-11 | 東京エレクトロン株式会社 | 高周波給電部材及びプラズマ処理装置 |
-
1985
- 1985-06-27 JP JP9665285U patent/JPS625703U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022003628A (ja) * | 2020-06-23 | 2022-01-11 | 東京エレクトロン株式会社 | 高周波給電部材及びプラズマ処理装置 |